STUDIES OF THE LATTICE DAMAGE CAUSED BY ION IMPLANTATION INTO Al<sub>x</sub>Ga<sub>1-x</sub>AS/GaAs

Bao An GONG, Xiao Li HAN, Dai Qing LI, Ting Qi REN, Ya WAN

STUDIES OF THE LATTICE DAMAGE CAUSED BY ION IMPLANTATION INTO Al_xGa_1-xAS/GaAs

Bao An GONG, Xiao Li HAN, Dai Qing LI, Ting Qi REN, Ya WAN

中国化学快报 . 1994, (08): 707 -710 .