STUDIES ON HOMOGENEOUS SCAVENG REACTION IN CONFINED ETCHANT LAYER TECHNIQUE FOR NANOLITHOGRAPHY (Ⅰ)──As (Ⅲ) SCAVENGING BROMINE REACTION

STUDIES ON HOMOGENEOUS SCAVENG REACTION IN CONFINED ETCHANT LAYER TECHNIQUE FOR NANOLITHOGRAPHY (Ⅰ)──As (Ⅲ) SCAVENGING BROMINE REACTION

Lian Yong SU, Jin LUO, Zhong Hua LIN, Zhao Wu TIAN

STUDIES ON HOMOGENEOUS SCAVENG REACTION IN CONFINED ETCHANT LAYER TECHNIQUE FOR NANOLITHOGRAPHY (Ⅰ)──As (Ⅲ) SCAVENGING BROMINE REACTION

Lian Yong SU, Jin LUO, Zhong Hua LIN, Zhao Wu TIAN

中国化学快报 . 1995, (03): 243 -246 .