STUDIES ON HOMOGENEOUS SCAVENG REACTION IN CONFINED ETCHANT LAYER TECHNIQUE FOR NANOLITHOGRAPHY (Ⅰ)──As (Ⅲ) SCAVENGING BROMINE REACTION

Lian Yong SU, Jin LUO, Zhong Hua LIN, Zhao Wu TIAN

中国化学快报 ›› 1995, Vol. 6 ›› Issue (03) : 243-246.
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STUDIES ON HOMOGENEOUS SCAVENG REACTION IN CONFINED ETCHANT LAYER TECHNIQUE FOR NANOLITHOGRAPHY (Ⅰ)──As (Ⅲ) SCAVENGING BROMINE REACTION

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STUDIES ON HOMOGENEOUS SCAVENG REACTION IN CONFINED ETCHANT LAYER TECHNIQUE FOR NANOLITHOGRAPHY (Ⅰ)──As (Ⅲ) SCAVENGING BROMINE REACTION

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{{article.zuoZheCn_L}}. {{article.title_cn}}. {{journal.qiKanMingCheng_CN}}. 1995, 6(03): 243-246
{{article.zuoZheEn_L}}. {{article.title_en}}. {{journal.qiKanMingCheng_EN}}. 1995, 6(03): 243-246

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