STUDIES OF THE LATTICE DAMAGE CAUSED BY ION IMPLANTATION INTO AlxGa1-xAS/GaAs

Bao An GONG, Xiao Li HAN, Dai Qing LI, Ting Qi REN, Ya WAN

Chinese Chemical Letters ›› 1994, Vol. 5 ›› Issue (08) : 707-710.
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STUDIES OF THE LATTICE DAMAGE CAUSED BY ION IMPLANTATION INTO AlxGa1-xAS/GaAs

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